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Horizontal Low Pressure Oxidation/Annealing Equipment

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Horizontal Low Pressure Oxidation/Annealing Equipment

Low Pressure oxidation, annealing.

Equipment name:

Horizontal Low Pressure Oxidation/Annealing Equipment


Equipment Model:

DOA-420/DOA-420L/DOA-420MAX


Equipment Application:

Low Pressure oxidation, annealing.


Features:


1、High throughput.

2、Patented technology, compatible or upgradeable with boron diffusion process.

3、Unique double-layer-nested furnace door structure.

4、High-speed and stable integral module boat pushing mechanism.

 

Parameters:


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